USE
Semiconductor manufacturing equipment: Diffusion furnace, RTP, various N₂ furnace atmosphere measurement
Air separation equipment
The TF-21D201 oxygen analyzer is an oxygen analyzer that employs a thick film sensor and digital signal processing technology.
Features
|
Model |
TF-21D201 |
|
Measurement principle |
Zirconia concentration cell method |
|
Measurement range |
0-10ppm-0-100% Any 4 ranges can be selected |
|
Linearity |
0-1% or more: ± 1% FS 0-1%: ± 2% FS 0-100ppm or less: ± 3% FS |
|
Repeatability |
± 1% F (less than S 0-1% range) ± 0.5% F (more than S 0-1% range) |
|
Response time |
0-1% or more: 10s or less 0-10% or less: 30 seconds or less (T90 response when switching calibration gas) |
|
Analog output |
4-20mA DC (fixed), 0-1, 0-5, 0-10V selectable |
|
Proofreading |
4 points + Air 1 point calibration (Please prepare standard gas) |
|
Installation |
Piping mounting with dedicated sensor mounting bracket |
|
Measuring method |
Direct mounting, sampling (individual correspondence) |
|
Power supply |
Either AC100,200V or DC24V |
|
External form (receiver) |
About W96 × D170 × H96 |
|
Weight |
Sensor approx. 1 kg, receiver approx. 1 kg |
