Use
Semiconductor manufacturing equipment: Diffusion furnace, RTP, various N₂ furnace atmosphere measurement air separation equipment
The SH-300 series oxygen analyzer is an oxygen analyzer that uses a thick film sensor and digital signal processing technology.
This model combines the sensor and receiver into one unit.
specification
|
Model |
SH-304 (Contact us for other models) |
|
Measurement principle |
Zirconia concentration cell method |
|
Measurement range |
0-10ppm-0-100% Any 4 ranges can be selected |
|
Linearity |
0-100ppm or less: ± 3% FS Less than 0-1% range: ± 2% FS 0-1% range or more: ± 4% FS |
|
Repeatability |
± 1% FS (less than 0-1%) ± 0.5% FS (more than 0-1%) |
|
Response time |
0-1% or more: 10s or less 0-1% or less: 30 seconds or less (T90 response when switching calibration gas) |
|
Analog output |
DC0-10V (Please contact us for other outputs) |
|
Proofreading |
4 points + Air 1 point calibration (Please prepare standard gas) |
|
Installation |
Panel cut, installed inside the device |
|
Measuring method |
Sampling method with built-in pump |
|
Power supply |
DC24V |
|
Outline |
About W175 × D270 × H129 |
|
weight |
About 4.5kg |
